Please visit the above links to have a more detailed look at our research projects. Below is a list of Centers that we are leading or affiliated with.

NSF MBM at UIUC - Miniature Brain Machinery

NSF STC EBICS at MIT/GT/UIUC - Emergent Behavior of Integrated Cellular Systems

NSF IGERT at UIUC - Cellular and Molecular Mechanics and Bionanotechnology
(download brochure)

NIH Training Grant at UIUC - Midwestern Cancer Nanotechnology Training Center
(download brochure)

NSF CiiT (I/UCRC) at UIUC - Center for Innovative Instrumentation Technology

NSF NSEC at OSU - Center for Affordable Nanoengineering for Polymeric Micro and Nanodevices



CNT Based Devices and Sensors

Vertically Oriented Carbon Nanotube Field Effect Transistor Manufacturing:

Matt Maschmann, Prof. Timothy S. Fisher, School of Mechanical Engineering

Prof. Rashid Bashir, School of Electrical and Computer Engineering / Department of Biomedical Engineering

Carbon nanotubes (CNTs) possess the ability to transport electrons with little or no resistance and may be either semiconducting or metallic in nature. Using semiconducting CNTs, it is possible to create nanoscale transistors that are far smaller and more efficient than conventional transistors used in existing electronics applications. Our laboratory utilizes a microwave Plasma Enhanced Chemical Vapor Deposition (PECVD) system for CNT synthesis. This system offers superior control over process variables including operating pressure, substrate temperature, gas composition, and applied substrate bias. We are capable of synthesizing both single and multi-walled carbon nanotubes by selecting appropriate growth and catalyst parameters. A number of novel CNT catalyst preparation techniques are currently being explored for their integration into a process flow for a vertically-oriented carbon nanotube field effect transistor (FET). The goal of this project is not only the creation of a functional vertically-oriented CNT FET device, but also a manufacturing method which will be reproducible and scalable for industrial applications.


[1] M.R. Maschmann, A. Goyal, Z. Iqbal, T.S. Fisher, and R. Gat, “Growth and
Characterization of Single-Walled Carbon Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition,” EMC conference, Notre Dame Univeristy, 2004.

[2] M.R. Maschmann, A. Goyal, Z. Iqbal, T.S. Fisher, and R. Gat, “Growth of Single-Walled Carbon Nanotubes by Microwave Plasma Enhancec Chemical Vapor Deposition,” submitted to Applied Physics Letters, 2004.