Silicon Field Effect Device Array For Label Free Detection Of DNA And Protiens

B. Reddy Jr., B. Dorvel, R. Bashir; University of Illinois, Urbana-Champaign
P. Nair, F. Butler, A. Alam, D. Bergstrom; Purdue University
R. Blosser, S. Clare; IU School of Medicine
D. Mitra, L. Lee; UC Berkeley

In this NIH and NSF funded project, we are working on fabrication, modeling and selective functionalization of nano-scale thickness field effect transistors for the label free detection of micro-RNAs and proteins. Semiconductor based field effect sensing of biomolecules has been shown to be a promising technology for biomedical diagnostics applications. Specifically, nanowire sensors have been implemented as excellent diagnostic tools via their label-free detection of relevant biomolecules down to

Figure 7: Schematic showing the field effect SiNW sensor device. If the width is larger than the thickness, the resulting device is termed a ‘nanoplate'.
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significantly lower concentrations than what has been achieved with current clinical techniques. However several issues still need to be addressed before such sensors can take their rightful place as powerful and effective diagnostic tools. We present novel solutions to two of the most important of such issues: 1– Current devices can not be fabricated en masse, and 2- Even if devices could potentially be made in large and dense arrays, they can not be functionalized individually. Our work presented here addresses both of these issues.